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Model 880 Deposition Controller
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Model 880 Deposition Controller
The Model 880 Controller is based on a multi-microprocessor design,
which enables rapid measurement updates with superior resolution,
as well as modular architecture. The unit has four slots for I/O cards;
each slot can house either an input card (8 optically isolated inputs)
or an output card (8 form-C SPDT relays). The sensor-head/source-control
modules provide two channels each for crystal frequency measurement and
two separate, isolated, analog 0-10 volt (plus and minus) outputs for
source control. The 880 can house four such modules, supporting up to
eigth channels of sensor input and 8 analog outputs, and enabling averaging
and co-deposition functions.
Model 880 Features
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Advanced measurement technique provides high accuracy at constant 100 ms
measurement period.
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Versatile process sequencing and process continuation control.
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Flexible programmable Input/Output structure for system control.
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Multi-program and multi-process storage.?
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Expandable Displays (optional) for simultaneous deposition of up to three materials.
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Multi-processor design allows module expansion while maintaining high
performance in all configurations.
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Two sensors inputs standard (6 additional sensor inputs - optional),
2 source (analog) outputs (6 additional configurable analog outputs optional).
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RS232/485 interface standard. Industrial fields busses optional.
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Weighted averaging of up to eight sensors for precise large area depositions.
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Large format numeric and graphic display with touch panel user interface.
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Optional removable memory module for process parameter storage and transfer.
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Expandable I/O up to 32 inputs or outputs (groups of 8) for use with
programmable logic I/O structure.
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Four-user definable front panel buttons and user definable indicators for use with
programmable logic I/O structure.
Model 880 Specifications
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Frequency Resolution: .03Hz @ fixed measurement period of 100ms
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Input sensor frequency: 2 to 10 MHz
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Thickness Display: 0.000 to 999.9 KA
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Rate Display: 0.0 to 999 A/sec
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Measurement update: 10/sec at all settings
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Inputs: 8 optically isolated/5-30v ac-dc or contact closure
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Outputs: 8 Form C relays per card, 24 volts @ 1 amp
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Source Outputs: +/- 2.5,5,10 volts @ 10 ma.
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Recorder Outputs: User programmable
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Field Busses: DeviceNet, PROFIBUS
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Input Power (universal): 90-264 volts AC 47/66 Hz, 1.4 amps rms
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Size: 3 1/2" height x 19" width x 8" depth (2U full rack-mount)
