Telemark UHV Linear Multi-pocket Sources

UHV Linear Multi-pocket Sources

TELEMARK MODEL 568 FEATURES

Mounted on 10 inch CF flange with all feedthroughs
(8 inch CF flange available as an option)

Will operate down to 10^-11 torr

XY Sweep coils with sweep frequency up to 75 Hz

Rugged, reliable construction

Designed for ease of use and maintainability

Permanent magnet for primary beam positioning insuring greater operating safety and control of secondary electron emission

Long filament life with 270° beam defection

Plug-in emitter assembly for easy filament replacement

Automatic Indexer available as an option

APPLICATION

The 568 is a precise, efficient UHV Multi-pocket electron beam source. Ideal for research and development applications, and small production jobs. The model 568 is unique for its size and capability to take up to four 15cc crucibles. This combined with a 6 kW power rating makes the 568 the most versatile miniature electron beam source available in the market place. This model also incorporates all of the unique design features that have made the Telemark electron beam guns the most widely used E-beam evaporation sources.

SPECIFICATIONS

Electron Beam: 270 degrees

Power Rating: 6 kW

Max High Voltage: -8 kV

Emission Current: 0 to 750 mA @ -8 kV

Cooling Water: 2 gallons per minute

Bake Out Temperature: 250°C

Distance from flange to center of the pocket:
568-01, 568-02, 568-03 11.00" (279.4mm)
568-04, 568-05, 568-06 14.50" (355.6mm)

MODELS

Five pocket 4cc: 568-01

Four pocket 7cc: 568-02

Three pocket 15cc: 568-03

Seven pocket 4cc: 568-04

Six pocket 7cc: 568-05

Four pocket 15cc: 568-06

TT-6 Specifications:
Maximum power 5.5 kW
Cost Effective Tetrode tube design for superior instantaneous arc-down recovery with +/- 2% voltage regulation. Adjustable constant voltage maintains stable beam position. Constant emission current regulation +/- 2%. 19 Inch rack mountable. TT-6 14.0 inchs (8U) high. Control, 5.25 inchs (3U) high. Handheld remote with joystick sweep control, Filament High Voltage ON and Emission Control. Four pattern sweep memory module standard

TELEMARK MODEL 528 FEATURES

Eliminate water leaks in the vacuum system.

270 degree beam deflection permanent magnet.

Bake out temperature of 250^oC

Base pressure of 10^-11 Torr or less attainable.

1.5cc Crucible

APPLICATION

The Model 528 provides a low cost, low maintenance electron beam source and eliminates the worry of water leakage from the water to vacuum seal, helping to assure success of vacuum deposition process where an operating pressure in the low 10^-10 Torr range is a necessary condition.

SPECIFICATIONS

Electron beam deflection: 270 degrees

Power maximum: 3 kW

High voltage: 4 kV

Emission Current: Up to .75 amp @ 4 kV

Cooling water: 2 gallons per minute

Bake-out temperatures: 250^oC

MODELS

Three pocket 528: 528-03

Four pockeet 528: 528-04

Five pocket 528: 528-05

Six pocket 528: 528-06


The TT-3 power supply was specifically designed for use with the Model 528 source. It provides high performance at a very attractive price, with a cost effective tetrode tube for voltage control and a simple, easily maintainable design. You may choose either a handheld or 19 inch mount controller.	Model 275-0018-3 Dual Pass High Voltage Feedthrough, or Equivalent, is required for installation of Model 528 source.